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2022 Speaker

Dr. Monita Pau

  • Onto Innovation
  • Director Strategic Marketing, Advanced Packaging
  • Biography

Dr. Monita Pau is Strategic Marketing Director for Advanced Packaging at Onto Innovation. Prior to joining Onto, she held various application engineering, marketing and strategic business development roles at DuPont and KLA. Her expertise spans across FOEL/BEOL process control solutions as well as advanced packaging and assembly materials serving both core and specialty semiconductor markets. Dr. Pau holds a Ph.D. degree in Chemistry from Stanford University.

  • Presentation

Addressing Process Control Challenges in Chiplet Integration

Chiplets architecture provides hyperscalers and HPC designers with a path to scale performance and power beyond Moore’s law without encountering the yield and cost issues of large monolithic die with sizes running up against the lithographic reticle limit. This new approach requires combining disparate silicon node technologies into a small footprint, with panel level packaging (PLP) and hybrid bonding being the two key enablers for the integration. In this presentation, we will discuss the challenges in enabling high volume manufacturing PLP technologies and delivering cost effective hybrid bonding solutions that can be applied to chiplet integration. The importance of process control analytics and chiplet genealogy information will also be explored.

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  • Company Profile

Onto Innovation

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.

General Telephone: +1 978 253 6200
General email:
Website: www.ontoinnovation.com

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